High Precision Chemical Replenishment Pumps CFD

These CFD pumps are used in the wet cleaning process in semiconductor manufacturing. Chemicals with high vapour pressure such as ammonia and hydrogen peroxide can also be pumped.

By using fluoroplastic, high purity and very good chemical resistance are achieved. The adjustment of the stroke length as well as the number of strokes enables the exact adjustment of the conveying capacity. Particle formation is prevented by the PFA hose connections.

Contamination-free construction

All wetted parts are made of fluoroplastic, with excellent resistance to heat and aggressive chemicals. Sharp corrosive liquids are safely conveyed with reduced particle emission.

Drive Sensor System

The actuator sensor system opens/closes the magnet by means of an end position sensor. Reliable operation as well as stable behaviour even with a low number of strokes are given.

The adoption of thick bellows allows pressures up to 4.5 bar. In addition, the bellows last 3 or 4 times longer than a diaphragm. FW Series pumps are used in cleaning, CPM and chemical circulation processes.

The connections for suction and discharge side are made of PFA. The integrated design prevents the accumulation of particles. If a special controller is connected, monitoring and controlling the flow rate is very easy.

High-speed strokes

The number of strokes varies according to type. As a result of the reduction in size, weight and cost, the number of strokes has been increased to 240 spm and the pulsation reduced.

Contamination-free construction

All wetted parts are made of fluoroplastic. The pump has been designed so that there are no unprotected metal parts. The exterior is also covered with fluoroplastic. The use of a piston seal (patent pending) has the effect of considerably reducing particle emission.

Wide temperature range/high pressure conveying 

Media with a temperature range of 5 to 180°C at a pressure of up to 5 bar can be pumped. The pump can be used for cleaning, CMP or chemical circulation processes.

Easy maintenance

The end position sensor can be replaced without dismantling the pump and regular retightening of the retaining screws is also unnecessary, thus reducing downtime

Drive Sensor System

The actuator sensor system opens/closes the magnet by means of an end position sensor. Therefore the output can be easily controlled or regulated if different controllers are connected.